Boron Target
Boron Target Description
We generally use powder metallurgy and smelting casting processing technology: mixing high-purity boron powder and additives in a certain proportion – compression molding – high-temperature sintering – wire cutting – grinding and polishing – welding back plate – strict quality inspection.
Features
- High purity, low magazine content and high performance of sputtered film.
- High melting point, good thermal stability, strong deformation resistance.
- Excellent chemical stability, corrosion resistance and oxidation resistance.
- Good surface finish, good dimensional accuracy, long service life.
Application
Boron Target can be widely used in semiconductor industry, solar cells, carbide cutting tools, optical field, electronics industry, scientific research field, energy field, magnetic recording field and so on.
- It is widely used in ion implantation process to manufacture various semiconductor devices, such as diodes, transistors, integrated circuits and so on.
- Physical vapor deposition (PVD) or chemical vapor deposition (CVD) are used to deposit boron films on semiconductor substrates to improve the performance and reliability of semiconductor devices.
- It is used to deposit boron film on the back of silicon wafer of solar cell to form back field and improve the conversion efficiency of heat energy to electric energy.
- It is used to deposit alloy coating on cutting tools to improve cutting performance and service life of the tools.
- It can be used to prepare optical films (anti-reflection film, reflection film, filter film, etc.), which can be applied to optical lenses or optical communication and other fields to improve the performance and efficiency of optical devices.
Boron Target Dimension
Grade |
AlSi 80-20 |
Purity |
99.9%,99.95%,99.99% |
Thickness |
1mm to 6mm |
Diameter |
50mm to 200mm |
Hardness |
1500 – 2500HV |
Sputtering rate |
0.1 – 1.0nm/min |
Density |
2.3-2.5g/cm3 |
Shape |
Disc |
Surface |
Polishing, Alkali Cleaning, Grinding, Black Oxide |
Standards: |
ASTM, GB/T |
Certification |
ISO 9001 |
Boron Target Pictures