TiSi Titanium Silicon Sputtering Targets

TiSi Titanium Silicon Sputtering Targets Pictures:

Sputtering targets are important components for operating magnetron sputtering technology and can be divided into three types: metals, alloys and ceramics. The higher the purity of the material, the higher the quality of the sputtered coating and the better its wear resistance, and the longer the protection of the tool. TiSi Titanium Silicon Sputtering Targets can be divided into flat targets, arc targets, cylindrical targets and tubular targets. They are generally produced using advanced HIP technology and have high hardness, low wear, excellent thermal shock resistance and purity. High, fine and uniform grains, long service life, high oxidation resistance and high coating quality, etc. Titanium Silicon Sputtering Targets are very suitable for working in harsh environments and are often used in PVD or CVD coating systems. They are very suitable for applications in the decorative coating industry, semiconductor device coating, hardware tool coating, automotive glass coating, vacuum coating, Medical industry, LED and photovoltaic devices and other fields.

TiSi Titanium Silicon Sputtering Targets Specifications:

Material

TiSi

Technique

Sintering,Forging,Annealing,Rolling,Vacuum Melting,Machining

Purity

95%

Size

Discs(Dia 300mm)

Sheet(Length 600mm, Width 300mm)

Tube (Diameter< 300mm)

Thickness

1mm-100mm

Density

4.46g/cm3

Surface

Polished,Bright,Chemical Cleaning,Black Oxide,etc.

Shape

Disc,Plate,Rectangular,Square,Column Targets

Standard

ASTM B348,GB,AMS,DIS

Certification

ISO9001

TiSi Titanium Silicon Sputtering Targets Picture

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